Monte Carlo Simulation of Ga Droplet Movement during the GaAs Langmuir Evaporation
- Авторлар: Spirina A.A.1,2, Nastovjak A.G.1, Neizvestny I.G.1,2, Shwartz N.L.1,2
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Мекемелер:
- A.V. Rzhanov Institute of Semiconductor Physics SB RAS
- Novosibirsk State Technical University
- Шығарылым: Том 52, № 16 (2018)
- Беттер: 2135-2139
- Бөлім: 26th INTERNATIONAL SYMPOSIUM “NANOSTRUCTURES: PHYSICS AND TECHNOLOGY”. NANOSTRUCTURE TECHNOLOGY
- URL: https://ogarev-online.ru/1063-7826/article/view/205498
- DOI: https://doi.org/10.1134/S1063782618160340
- ID: 205498
Дәйексөз келтіру
Аннотация
A kinetic lattice Monte Carlo model is used to study the Ga droplets self-propelled motion along GaAs(111)A and (111)B surfaces during the initial stage of high-temperature annealing. An estimation of the droplet velocity, running along (111)A and (111)B surfaces, in a wide temperature range, is carried out. The mechanism of small Ga drops movement during high-temperature annealing is suggested. Different directions of droplets motion and the morphology of drop-crystal interface on (111)A and (111)B substrates are determined by a difference in the etching rate of (111)A and (111)B facets by liquid gallium. It is shown that metal droplets can cause step bunching.
Авторлар туралы
A. Spirina
A.V. Rzhanov Institute of Semiconductor Physics SB RAS; Novosibirsk State Technical University
Хат алмасуға жауапты Автор.
Email: spirina.anna.alex@gmail.com
Ресей, Novosibirsk; Novosibirsk, 630073
A. Nastovjak
A.V. Rzhanov Institute of Semiconductor Physics SB RAS
Email: spirina.anna.alex@gmail.com
Ресей, Novosibirsk
I. Neizvestny
A.V. Rzhanov Institute of Semiconductor Physics SB RAS; Novosibirsk State Technical University
Email: spirina.anna.alex@gmail.com
Ресей, Novosibirsk; Novosibirsk, 630073
N. Shwartz
A.V. Rzhanov Institute of Semiconductor Physics SB RAS; Novosibirsk State Technical University
Email: spirina.anna.alex@gmail.com
Ресей, Novosibirsk; Novosibirsk, 630073
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