Monte Carlo Simulation of Ga Droplet Movement during the GaAs Langmuir Evaporation
- 作者: Spirina A.A.1,2, Nastovjak A.G.1, Neizvestny I.G.1,2, Shwartz N.L.1,2
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隶属关系:
- A.V. Rzhanov Institute of Semiconductor Physics SB RAS
- Novosibirsk State Technical University
- 期: 卷 52, 编号 16 (2018)
- 页面: 2135-2139
- 栏目: 26th INTERNATIONAL SYMPOSIUM “NANOSTRUCTURES: PHYSICS AND TECHNOLOGY”. NANOSTRUCTURE TECHNOLOGY
- URL: https://ogarev-online.ru/1063-7826/article/view/205498
- DOI: https://doi.org/10.1134/S1063782618160340
- ID: 205498
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详细
A kinetic lattice Monte Carlo model is used to study the Ga droplets self-propelled motion along GaAs(111)A and (111)B surfaces during the initial stage of high-temperature annealing. An estimation of the droplet velocity, running along (111)A and (111)B surfaces, in a wide temperature range, is carried out. The mechanism of small Ga drops movement during high-temperature annealing is suggested. Different directions of droplets motion and the morphology of drop-crystal interface on (111)A and (111)B substrates are determined by a difference in the etching rate of (111)A and (111)B facets by liquid gallium. It is shown that metal droplets can cause step bunching.
作者简介
A. Spirina
A.V. Rzhanov Institute of Semiconductor Physics SB RAS; Novosibirsk State Technical University
编辑信件的主要联系方式.
Email: spirina.anna.alex@gmail.com
俄罗斯联邦, Novosibirsk; Novosibirsk, 630073
A. Nastovjak
A.V. Rzhanov Institute of Semiconductor Physics SB RAS
Email: spirina.anna.alex@gmail.com
俄罗斯联邦, Novosibirsk
I. Neizvestny
A.V. Rzhanov Institute of Semiconductor Physics SB RAS; Novosibirsk State Technical University
Email: spirina.anna.alex@gmail.com
俄罗斯联邦, Novosibirsk; Novosibirsk, 630073
N. Shwartz
A.V. Rzhanov Institute of Semiconductor Physics SB RAS; Novosibirsk State Technical University
Email: spirina.anna.alex@gmail.com
俄罗斯联邦, Novosibirsk; Novosibirsk, 630073
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