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Vol 53, No 12 (2019)
Deposition of Amorphous and Microcrystalline Films of Silicon by the Gas-Jet Plasma-Chemical Method
Shchukin V.G., Konstantinov V.O., Sharafutdinov R.G.
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(Eng)
Vol 53, No 9 (2019)
Plasma-Chemical Deposition of Diamond-Like Films onto the Surface of Heavily Doped Single-Crystal Diamond
Korolyov S.A., Kraev S.A., Arkhipova E.A., Skorokhodov E.V., Bushuykin P.A., Shashkin V.I., Okhapkin A.I., Yunin P.A., Drozdov M.N.
PDF
(Eng)
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