Composition and Structure of Ga1 – xNaxAs Nanolayers Produced near the GaAs Surface by Na+ Implantation


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The composition and structure of nanodimensional Ga1 – xNaxAs phases produced by implantation of Na+ ions into the near-surface area of GaAs have been studied by Auger electron spectroscopy and fast electron diffraction. It has been found that the thickness of the ternary epitaxial layer is 10–12 nm for ion energy E0 = 20 keV. The composition of the three-layer nanosystems is GaAs–Ga0.5Na0.5As–GaAs.

Sobre autores

Kh. Boltaev

Tashkent State Technical University

Autor responsável pela correspondência
Email: ftmet@rambler.ru
Uzbequistão, Universitetskaya ul. 2, Tashkent, 100095

Zh. Sodikjanov

Tashkent State Technical University

Email: ftmet@rambler.ru
Uzbequistão, Universitetskaya ul. 2, Tashkent, 100095

D. Tashmukhamedova

Tashkent State Technical University

Email: ftmet@rambler.ru
Uzbequistão, Universitetskaya ul. 2, Tashkent, 100095

B. Umirzakov

Tashkent State Technical University

Email: ftmet@rambler.ru
Uzbequistão, Universitetskaya ul. 2, Tashkent, 100095

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