Отправить статью по E-mail Structural, Optical, and Thermoelectric Properties of the ZnO:Al Films Synthesized by Atomic Layer Deposition
- Авторы: Tambasov I.A.1, Volochaev M.N.1, Voronin A.S.2, Evsevskaya N.P.1,3, Masyugin A.N.4, Aleksandrovskii A.S.1,5, Smolyarova T.E.2,5, Nemtsev I.V.1, Lyashchenko S.A.1, Bondarenko G.N.3, Tambasova E.V.4
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Учреждения:
- Kirensky Institute of Physics, Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences
- Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences
- Institute of Chemistry and Chemical Technology, Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences
- Siberian State University of Science and Technology
- Siberian Federal University
- Выпуск: Том 61, № 10 (2019)
- Страницы: 1904-1909
- Раздел: Physics of Surface and Thin Films
- URL: https://ogarev-online.ru/1063-7834/article/view/206382
- DOI: https://doi.org/10.1134/S1063783419100354
- ID: 206382
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Аннотация
Aluminum-doped zinc oxide thin films have been grown by atomic layer deposition at a temperature of 200°C. Using X-ray diffraction, it has been established that the ZnO:Al thin films exhibits the reflections from the (100), (002), (110), and (201) ZnO hexagonal phase planes. The (101) and (102) planes have also been detected by electron diffraction. The ZnO:Al thin films grow smooth with a root-mean-square roughness of Rq = 0.33 nm and characteristic nanocrystallite sizes of ~70 and ~15 nm without additional aluminum or aluminum oxide phases. The transmission at a wavelength of 550 nm with regard to the substrate has been found to be 96%. The refractive indices and absorption coefficients of the ZnO:Al thin films in the wavelength range of 250–900 nm have been determined. The maximum refractive indices and absorption coefficients have been found to be 2.09 at a wavelength of 335 nm and 0.39 at a wavelength of 295 nm, respectively. The optical band gap is 3.56 eV. The resistivity, Seebeck coefficient, and power factor of the ZnO:Al thin films are ∼1.02 × 10–3 Ω cm, –60 μV/K, and 340 μW m–1 K–2 at room temperature, respectively. The maximum power factor attains 620 μW m–1 K–2 at a temperature of 200°C.
Об авторах
I. Tambasov
Kirensky Institute of Physics, Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660036
M. Volochaev
Kirensky Institute of Physics, Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660036
A. Voronin
Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660036
N. Evsevskaya
Kirensky Institute of Physics, Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences; Institute of Chemistry and Chemical Technology, Krasnoyarsk Scientific Center, Siberian Branch,Russian Academy of Sciences
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660036; Krasnoyarsk, 660036
A. Masyugin
Siberian State University of Science and Technology
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660014
A. Aleksandrovskii
Kirensky Institute of Physics, Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences; Siberian Federal University
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660036; Krasnoyarsk, 660041
T. Smolyarova
Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences; Siberian Federal University
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660036; Krasnoyarsk, 660041
I. Nemtsev
Kirensky Institute of Physics, Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660036
S. Lyashchenko
Kirensky Institute of Physics, Krasnoyarsk Scientific Center, Siberian Branch, Russian Academy of Sciences
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660036
G. Bondarenko
Institute of Chemistry and Chemical Technology, Krasnoyarsk Scientific Center, Siberian Branch,Russian Academy of Sciences
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660036
E. Tambasova
Siberian State University of Science and Technology
Email: tambasov_igor@mail.ru
Россия, Krasnoyarsk, 660014
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