Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering

V. F. Kobziev; R. M. Zakirova; N. V. Kostenkov; P. N. Krylov; I. V. Fedotova

doi:10.1134/S1063782617060161

Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering

Авторы: Kobziev V.F.¹, Zakirova R.M.¹, Kostenkov N.V.¹, Krylov P.N.¹, Fedotova I.V.¹
Учреждения:
1. Udmurt State University
Выпуск: Том 51, № 6 (2017)
Страницы: 817-822
Раздел: Fabrication, Treatment, and Testing of Materials and Structures
URL: https://ogarev-online.ru/1063-7826/article/view/200110
DOI: https://doi.org/10.1134/S1063782617060161
ID: 200110

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Аннотация

The effect of the condensation temperature on the growth rate, structure, and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering is studied. As the deposition temperature is increased, the film thickness decreases. Polycrystalline zinc-selenide films consist of a mixture of cubic and hexagonal phases, of which the cubic phase is dominant. A correlation between the refractive index and the crystallite size is shown.