Physical Properties of Solid Solutions InxAl1–xN
- Autores: Brudnyi V.N.1, Vilisova M.D.1, Velikovskii L.É.1
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Afiliações:
- National Research Tomsk State University
- Edição: Volume 61, Nº 6 (2018)
- Páginas: 1160-1166
- Seção: Article
- URL: https://ogarev-online.ru/1064-8887/article/view/240690
- DOI: https://doi.org/10.1007/s11182-018-1511-6
- ID: 240690
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Resumo
The phase diagrams and the results of studies of the GaN, AlN and InN ternary solid solutions grown using the magnetron sputtering, molecular beam epitaxy, and metalorganic vapour-phase epitaxy technologies and intended for the production of ultrahigh-frequency InAlN/GaN HEMT transistors are analyzed.
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Sobre autores
V. Brudnyi
National Research Tomsk State University
Autor responsável pela correspondência
Email: brudnyi@mail.tsu.ru
Rússia, Tomsk
M. Vilisova
National Research Tomsk State University
Email: brudnyi@mail.tsu.ru
Rússia, Tomsk
L. Velikovskii
National Research Tomsk State University
Email: brudnyi@mail.tsu.ru
Rússia, Tomsk
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