The Influence of the Substrate Material on the Structure and Electrophysical Properties of BaxSr1 – xTiO3 Thin Films


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The high-frequency spraying method has been used to produce BaxSr1–xTiO3 thin films on (111)Pt/(100)Si and SiOx/(100)Si substrates. The synthesized films have proven to be single-phase with a polycrystalline structure. In this paper, we show the influence of the platinum sublayer on such parameters as roughness, mean size of grains, and the local polarization of BaxSr1–xTiO3 thin films. Possible mechanisms of the obtained results related to the intragrain conductivity and the nature of interaction of a ferroelectric film with its substrate are discussed.

作者简介

M. Afanasiev

Fryazino Branch of Kotel’nikov Institute of Radio Engineering and Electronics

Email: dm.kiselev@gmail.com
俄罗斯联邦, Fryazino, Moscow oblast, 141190

D. Kiselev

Fryazino Branch of Kotel’nikov Institute of Radio Engineering and Electronics; National University of Science and Technology MISiS

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Email: dm.kiselev@gmail.com
俄罗斯联邦, Fryazino, Moscow oblast, 141190; Moscow, 119049

S. Levashov

Fryazino Branch of Kotel’nikov Institute of Radio Engineering and Electronics

Email: dm.kiselev@gmail.com
俄罗斯联邦, Fryazino, Moscow oblast, 141190

V. Luzanov

Fryazino Branch of Kotel’nikov Institute of Radio Engineering and Electronics

Email: dm.kiselev@gmail.com
俄罗斯联邦, Fryazino, Moscow oblast, 141190

A. Nabiyev

Azerbaijan State Pedagogical University

Email: dm.kiselev@gmail.com
阿塞拜疆, Baku, 370000

V. Naryshkina

Fryazino Branch of Kotel’nikov Institute of Radio Engineering and Electronics

Email: dm.kiselev@gmail.com
俄罗斯联邦, Fryazino, Moscow oblast, 141190

A. Sivov

Fryazino Branch of Kotel’nikov Institute of Radio Engineering and Electronics

Email: dm.kiselev@gmail.com
俄罗斯联邦, Fryazino, Moscow oblast, 141190

G. Chucheva

Fryazino Branch of Kotel’nikov Institute of Radio Engineering and Electronics

Email: dm.kiselev@gmail.com
俄罗斯联邦, Fryazino, Moscow oblast, 141190

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