Simulation of Wetting Phase Transitions in Thin Films


如何引用文章

全文:

开放存取 开放存取
受限制的访问 ##reader.subscriptionAccessGranted##
受限制的访问 订阅存取

详细

Based on the hydrodynamic model, the kinetics of wetting phase transitions in nanoscale liquid films on the substrate surface is analyzed. In the range of metastable states, the features of the formation of equilibrium clusters are studied and corresponding film thickness distributions are calculated. In the range of unstable states, the kinetics of the phase transition resulting in cluster formation is analyzed. In the early stage, regions shaped as holes with a film thickness close to the equilibrium one are formed. Hole coalescence leads to a film material redistribution followed by clustering. For this process, the kinetics of the average hole size and concentration is calculated. For formed clusters, the kinetics of the average radius, average height, concentration, and their radius and height distribution function are studied.

作者简介

P. L’vov

Ulyanovsk State University; Institute of Nanotechnology of Microelectronics, Russian Academy of Sciences

编辑信件的主要联系方式.
Email: LvovPE@sv.uven.ru
俄罗斯联邦, Ulyanovsk, 432000; Moscow, 119991

V. Svetukhin

Scientific and Production Company Technological Center,

Email: LvovPE@sv.uven.ru
俄罗斯联邦, Zelenograd, Moscow, 124498

S. Bulyarskii

Institute of Nanotechnology of Microelectronics, Russian Academy of Sciences

Email: LvovPE@sv.uven.ru
俄罗斯联邦, Moscow, 119991

A. Pavlov

Institute of Nanotechnology of Microelectronics, Russian Academy of Sciences

Email: LvovPE@sv.uven.ru
俄罗斯联邦, Moscow, 119991

补充文件

附件文件
动作
1. JATS XML

版权所有 © Pleiades Publishing, Ltd., 2019