Diffusion of interstitial magnesium in dislocation-free silicon
- Авторлар: Shuman V.B.1, Lavrent’ev A.A.1, Astrov Y.A.1, Lodygin A.N.1, Portsel L.M.1
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Мекемелер:
- Ioffe Physical–Technical Institute
- Шығарылым: Том 51, № 1 (2017)
- Беттер: 1-3
- Бөлім: Nonelectronic Properties of Semiconductors (Atomic Structure, Diffusion)
- URL: https://ogarev-online.ru/1063-7826/article/view/199259
- DOI: https://doi.org/10.1134/S1063782617010237
- ID: 199259
Дәйексөз келтіру
Аннотация
The diffusion of magnesium impurity in the temperature range T = 600–800°C in dislocation-free single-crystal silicon wafers of p-type conductivity is studied. The surface layer of the wafer doped with magnesium by the ion implantation technique serves as the diffusion source. Implantation is carried out at an ion energy of 150 keV at doses of 5 × 1014 and 2 × 1015 cm–2. The diffusion coefficient of interstitial magnesium donor centers (Di) is determined by measuring the depth of the p–n junction, which is formed in the sample due to annealing during the time t at a given T. As a result of the study, the dependence Di(T) is found for the first time. The data show that the diffusion process occurs mainly by the interstitial mechanism.
Авторлар туралы
V. Shuman
Ioffe Physical–Technical Institute
Хат алмасуға жауапты Автор.
Email: Shuman@mail.ioffe.ru
Ресей, St. Petersburg, 194021
A. Lavrent’ev
Ioffe Physical–Technical Institute
Email: Shuman@mail.ioffe.ru
Ресей, St. Petersburg, 194021
Yu. Astrov
Ioffe Physical–Technical Institute
Email: Shuman@mail.ioffe.ru
Ресей, St. Petersburg, 194021
A. Lodygin
Ioffe Physical–Technical Institute
Email: Shuman@mail.ioffe.ru
Ресей, St. Petersburg, 194021
L. Portsel
Ioffe Physical–Technical Institute
Email: Shuman@mail.ioffe.ru
Ресей, St. Petersburg, 194021
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