Methods for Synthesis, Purification, and Study of the Composition of Hexafluoroethan. Review

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Abstract

The review presents literature data on methods for synthesizing hexaf luoroethane, a gaseous fluorine carrier for silicon etching in the semiconductor industry – catalytic fluorination of fluorochlorocarbons with hydrogen fluoride; fluorination with fluorine, variable-valence metal fluorides, uranium hexafluoride, ethane, ethylene, fluoroethanes, fluoroethylenes, fluorochloroethanes, and fluorochloroethylenes; fluorination of carbon with fluorine; pyrolysis of perfluorocarbons; electrochemical methods. The advantages and disadvantages of these methods are presented. Methods for purifying hexafluoroethane from impurities formed during synthesis are also considered, including decantation, neutralization, rectification, adsorption, etc. Methods for studying the composition of hexafluoroethane are considered, including gas chromatography, spectral methods, and determination of gas moisture and acidity.

About the authors

E. V. Sadikova

Aurora Chemicals LLC

Email: sadikova_ev@mail.ru
Seversk, Tomsk Region, Russia

D. S. Pashkevich

Peter the Great St. Petersburg Polytechnic University

St. Petersburg, Russian Federation

V. V. Kapustin

Russian Scientific Center “Applied Chemistry (GIPH)” JSC

St. Petersburg, Russian Federation

T. S. Kholopova

Aurora Chemicals LLC

Seversk, Tomsk Region, Russia

E. S. Kurapova

Russian Scientific Center “Applied Chemistry (GIPH)” JSC

St. Petersburg, Russian Federation

A. M. Chebysheva

Russian Scientific Center “Applied Chemistry (GIPH)” JSC

St. Petersburg, Russian Federation

T. A. Fedorova

Aurora Chemicals LLC

Seversk, Tomsk Region, Russia

O. V. Platonova

Russian Scientific Center “Applied Chemistry (GIPH)” JSC

St. Petersburg, Russian Federation

P. S. Kambur

Russian Scientific Center “Applied Chemistry (GIPH)” JSC

St. Petersburg, Russian Federation

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