Optical properties of nonstoichiometric ZrOx according to spectroellipsometry data
- Авторлар: Kruchinin V.N.1, Aliev V.S.1, Gerasimova A.K.1, Gritsenko V.A.1,2
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Мекемелер:
- Rzhanov Institute of Semiconductor Physics, Siberian Branch
- Novosibirsk State University
- Шығарылым: Том 121, № 2 (2016)
- Беттер: 241-245
- Бөлім: Condensed-Matter Spectroscopy
- URL: https://ogarev-online.ru/0030-400X/article/view/164951
- DOI: https://doi.org/10.1134/S0030400X16080099
- ID: 164951
Дәйексөз келтіру
Аннотация
Amorphous nonstoichiometric ZrOx films of different composition have been synthesized by the method of ion-beam sputtering deposition of metallic zirconium in the presence of oxygen at different partial oxygen pressures in the growth zone, and their optical properties have been studied in the spectral range of 1.12–4.96 eV. It is found that light-absorbing films with metallic conductivity are formed at the partial oxygen pressure below 1.04 × 10–3 Pa and transparent films with dielectric conductivity are formed at the pressure above 1.50 × 10–3 Pa. It is shown that the spectral dependences of optical constants of ZrOx films are described well by the corresponding dispersion models: the Cauchy polynomial model for films with dielectric conductivity and the Lorentz–Drude oscillator model for films with metallic conductivity.
Авторлар туралы
V. Kruchinin
Rzhanov Institute of Semiconductor Physics, Siberian Branch
Хат алмасуға жауапты Автор.
Email: kruch@isp.nsc.ru
Ресей, Novosibirsk, 630090
V. Aliev
Rzhanov Institute of Semiconductor Physics, Siberian Branch
Email: kruch@isp.nsc.ru
Ресей, Novosibirsk, 630090
A. Gerasimova
Rzhanov Institute of Semiconductor Physics, Siberian Branch
Email: kruch@isp.nsc.ru
Ресей, Novosibirsk, 630090
V. Gritsenko
Rzhanov Institute of Semiconductor Physics, Siberian Branch; Novosibirsk State University
Email: kruch@isp.nsc.ru
Ресей, Novosibirsk, 630090; Novosibirsk, 630090
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