Optical properties of nonstoichiometric ZrOx according to spectroellipsometry data


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Аннотация

Amorphous nonstoichiometric ZrOx films of different composition have been synthesized by the method of ion-beam sputtering deposition of metallic zirconium in the presence of oxygen at different partial oxygen pressures in the growth zone, and their optical properties have been studied in the spectral range of 1.12–4.96 eV. It is found that light-absorbing films with metallic conductivity are formed at the partial oxygen pressure below 1.04 × 10–3 Pa and transparent films with dielectric conductivity are formed at the pressure above 1.50 × 10–3 Pa. It is shown that the spectral dependences of optical constants of ZrOx films are described well by the corresponding dispersion models: the Cauchy polynomial model for films with dielectric conductivity and the Lorentz–Drude oscillator model for films with metallic conductivity.

Авторлар туралы

V. Kruchinin

Rzhanov Institute of Semiconductor Physics, Siberian Branch

Хат алмасуға жауапты Автор.
Email: kruch@isp.nsc.ru
Ресей, Novosibirsk, 630090

V. Aliev

Rzhanov Institute of Semiconductor Physics, Siberian Branch

Email: kruch@isp.nsc.ru
Ресей, Novosibirsk, 630090

A. Gerasimova

Rzhanov Institute of Semiconductor Physics, Siberian Branch

Email: kruch@isp.nsc.ru
Ресей, Novosibirsk, 630090

V. Gritsenko

Rzhanov Institute of Semiconductor Physics, Siberian Branch; Novosibirsk State University

Email: kruch@isp.nsc.ru
Ресей, Novosibirsk, 630090; Novosibirsk, 630090

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