Investigation of Thin Porous Films Based on a Precursor Containing Phenylene Bridge Groups
- 作者: Vorotyntsev D.A.1, Vishnevskiy A.S.1, Seregin D.S.1, Vorotilov K.A.1, Sigov A.S.1, Baklanov M.R.1
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隶属关系:
- MIREA – Russian Technological University
- 期: 卷 118, 编号 2 (2023): THEMED SECTION: FUNDAMENTAL PROBLEMS OF MULTILEVEL METALLIZATION SYSTEMS FOR ULTRA-LARGE INTEGRATED CIRCUITS
- 页面: 31-52
- 栏目: THEMED SECTION: FUNDAMENTAL SCIENTIFIC RESEARCH IN THE FIELD OF NATURAL SCIENCES
- URL: https://ogarev-online.ru/1605-8070/article/view/301077
- DOI: https://doi.org/10.22204/2410-4639-2023-118-02-31-52
- ID: 301077
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全文:
详细
This work is aimed at studying a microporous organosilicate film with phenylene bridges, as well as an attempt to hydrophobize it by modifying its surface with hexamethyldisilazane (HMDS) vapor. This 1,4-phenylene-bridged film has a large Young’s modulus and small pore size. However, due to steric effects during the film formation, a large amount of unreacted silanol remains. Hydrophobization by HMDS reduces amount of residual silanols and adsorbed water. A decrease in the hydrophilicity of the film surface leads to an increase in the WCA value as well as a decrease in the k and tgδ values. Ellipsometric porosimetry brings out open porosity decrease without changing of pore size distribution as a result of silylation by HMDS vapour. However, FTIR spectra show limited time dependent temperature stability of methyl groups introduced by HMDS vapour treatment. Heat treatment of the hydrophobized film has shown a reduction in open porosity, less shrinkage and a higher Young’s modulus.
作者简介
Dmitry Vorotyntsev
MIREA – Russian Technological University
编辑信件的主要联系方式.
Email: dima.vorotyntsev@mail.ru
俄罗斯联邦, 78 Vernadsky Ave., Moscow, 119454, Russia
Alexey Vishnevskiy
MIREA – Russian Technological University
Email: vishnevskiy@mirea.ru
俄罗斯联邦, 78 Vernadsky Ave., Moscow, 119454, Russia
Dmitry Seregin
MIREA – Russian Technological University
Email: d_seregin@mirea.ru
俄罗斯联邦, 78 Vernadsky Ave., Moscow, 119454, Russia
Konstantin Vorotilov
MIREA – Russian Technological University
Email: vorotilov@mirea.ru
俄罗斯联邦, 78 Vernadsky Ave., Moscow, 119454, Russia
Alexander Sigov
MIREA – Russian Technological University
Email: sigov@mirea.ru
俄罗斯联邦, 78 Vernadsky Ave., Moscow, 119454, Russia
Mikhail Baklanov
MIREA – Russian Technological University
Email: baklanovmr@gmail.com
俄罗斯联邦, 78 Vernadsky Ave., Moscow, 119454, Russia
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