Fabrication of the Fully Hybrid Microcavities Based on Zn(S)Se Epilayers and Amorphous Dielectrics

Abstract

A technique of fabrication of fully-hybrid microcavities using II-VI semiconductor compound epilayers and distributed Bragg reflectors based on amorphous dielectric coating is described. The fully hybrid microcavities with Zn(S)Se epilayers are created. High structural and optical quality of the embedded Zn(S)Se thin films was established by atomic-force microscopy and optic studies. The analysis of excitonic spectra for Zn(S)Se epilayers embedded in the fully hybrid microcavities indicates that such structure can be perspective for creation of a new type of light-emitting devices – polariton lasers.