Email this article Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering
- Authors: Zakharov A.N.1, Solov’ev A.A.1,2, Oskomov K.V.1, Oskirko V.O.1, Semenov V.A.1, Syrtanov M.S.2, Bordulev Y.S.2
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Affiliations:
- Institute of High-Current Electronics of the Siberian Branch of the Russian Academy of Sciences
- National Research Tomsk Polytechnic University
- Issue: Vol 60, No 8 (2017)
- Pages: 1336-1340
- Section: Article
- URL: https://ogarev-online.ru/1064-8887/article/view/238581
- DOI: https://doi.org/10.1007/s11182-017-1218-0
- ID: 238581
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Abstract
Results of experiments on deposition of thin molybdenum films on glass substrates by high-power impulse magnetron sputtering are presented. Two high-current modes with different pulse frequencies and durations are used. Properties of the produced molybdenum films are compared with those of films produced by magnetron sputtering at a direct current. It is shown that this method allows the resistivity of molybdenum films to be decreased and their reflectance in the visible range to be increased.
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About the authors
A. N. Zakharov
Institute of High-Current Electronics of the Siberian Branch of the Russian Academy of Sciences
Author for correspondence.
Email: zare17@yandex.ru
Russian Federation, Tomsk
A. A. Solov’ev
Institute of High-Current Electronics of the Siberian Branch of the Russian Academy of Sciences; National Research Tomsk Polytechnic University
Email: zare17@yandex.ru
Russian Federation, Tomsk; Tomsk
K. V. Oskomov
Institute of High-Current Electronics of the Siberian Branch of the Russian Academy of Sciences
Email: zare17@yandex.ru
Russian Federation, Tomsk
V. O. Oskirko
Institute of High-Current Electronics of the Siberian Branch of the Russian Academy of Sciences
Email: zare17@yandex.ru
Russian Federation, Tomsk
V. A. Semenov
Institute of High-Current Electronics of the Siberian Branch of the Russian Academy of Sciences
Email: zare17@yandex.ru
Russian Federation, Tomsk
M. S. Syrtanov
National Research Tomsk Polytechnic University
Email: zare17@yandex.ru
Russian Federation, Tomsk
Yu. S. Bordulev
National Research Tomsk Polytechnic University
Email: zare17@yandex.ru
Russian Federation, Tomsk
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