Coaxial (tubular) glow discharge in electronegative gases

详细

The positive-column plasma of a low- and medium-pressure electronegative glow discharge initiated in the gap between two coaxial cylindrical tubes has been considered (the current is directed along the tube axis). It is assumed that the gas mixture contains halogens, and ion diffusion is not negligibly weak. It is found that the coaxial discharge is characterized by plasma separation into three coaxial regions with different compositions in the direction transverse to the current. It has been shown that the ionization and excitation frequencies of atoms are higher than in the purely cylindrical case, even for a small (0.05–0.15) ratio of the radii of the inner and outer walls. An asymptotic analysis of the continuity equations yields analytic expressions that make it possible to rapidly and easily estimate the geometrical parameters of the spatial distributions of charge particle concentrations, as well as energy parameters of the plasma for the radii ratio that exceed 0.3. The conditions for the applicability of analytic relations and their accuracy are established from a comparison of the results of analytic and numerical calculations.