Multilayer Ag/Y Mirrors for the Spectral Range of 9–11 nm

D. S. Kvashennikov; S. Yu. Zuev; V. N. Polkovnikov; N. N. Salashchenko; N. I. Chkhalo; F. Delmotte; E. Meltchakov

doi:10.1134/S1063784219110161

Multilayer Ag/Y Mirrors for the Spectral Range of 9–11 nm

Authors: Kvashennikov D.S.¹^,2, Zuev S.Y.¹, Polkovnikov V.N.¹, Salashchenko N.N.¹, Chkhalo N.I.¹, Delmotte F.³, Meltchakov E.³
Affiliations:
1. Institute for Physics of Microstructures, Russian Academy of Sciences
2. Lobachevsky State University
3. Laboratoire Charles Fabry, Institut d’Optique Graduate School
Issue: Vol 64, No 11 (2019)
Pages: 1684-1687
Section: Article
URL: https://ogarev-online.ru/1063-7842/article/view/204589
DOI: https://doi.org/10.1134/S1063784219110161
ID: 204589

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Abstract

Multilayer Ag/Y mirrors intended for the spectral range of 9–11 nm have been investigated. The parameters of mirrors, specifically, the thicknesses of transition layers, have been determined. The efficiency of B₄C and Si barrier layers has been demonstrated. It has been shown that the properties of structures like Ag/Y and Ag/Y with B₄C and Si barriers layers have poor temporal stability. The highest reflection coefficient of 18% at a wavelength of 9.34 nm, has been observed for the Ag/Si/Y structure. The same structure has the best temporal stability.

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Multilayer Ag/Y Mirrors for the Spectral Range of 9–11 nm

Full Text

Abstract

About the authors

D. S. Kvashennikov

S. Yu. Zuev

V. N. Polkovnikov

N. N. Salashchenko

N. I. Chkhalo

F. Delmotte

E. Meltchakov

Supplementary files