Multilayer Ag/Y Mirrors for the Spectral Range of 9–11 nm
- Авторы: Kvashennikov D.S.1,2, Zuev S.Y.1, Polkovnikov V.N.1, Salashchenko N.N.1, Chkhalo N.I.1, Delmotte F.3, Meltchakov E.3
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Учреждения:
- Institute for Physics of Microstructures, Russian Academy of Sciences
- Lobachevsky State University
- Laboratoire Charles Fabry, Institut d’Optique Graduate School
- Выпуск: Том 64, № 11 (2019)
- Страницы: 1684-1687
- Раздел: Article
- URL: https://ogarev-online.ru/1063-7842/article/view/204589
- DOI: https://doi.org/10.1134/S1063784219110161
- ID: 204589
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Аннотация
Multilayer Ag/Y mirrors intended for the spectral range of 9–11 nm have been investigated. The parameters of mirrors, specifically, the thicknesses of transition layers, have been determined. The efficiency of B4C and Si barrier layers has been demonstrated. It has been shown that the properties of structures like Ag/Y and Ag/Y with B4C and Si barriers layers have poor temporal stability. The highest reflection coefficient of 18% at a wavelength of 9.34 nm, has been observed for the Ag/Si/Y structure. The same structure has the best temporal stability.
Об авторах
D. Kvashennikov
Institute for Physics of Microstructures, Russian Academy of Sciences; Lobachevsky State University
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 607680; Nizhny Novgorod, 603950
S. Zuev
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 607680
V. Polkovnikov
Institute for Physics of Microstructures, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 607680
N. Salashchenko
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 607680
N. Chkhalo
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: polkovnikov@ipmras.ru
Россия, Nizhny Novgorod, 607680
F. Delmotte
Laboratoire Charles Fabry, Institut d’Optique Graduate School
Email: polkovnikov@ipmras.ru
Франция, Palatseau, 91127
E. Meltchakov
Laboratoire Charles Fabry, Institut d’Optique Graduate School
Email: polkovnikov@ipmras.ru
Франция, Palatseau, 91127
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