Plasma-chemical reactor based on a low-pressure pulsed arc discharge for synthesis of nanopowders

Abstract

A reactor for producing nanopowders in the plasma of a low-pressure arc discharge has been developed. As a plasma source, a pulsed cold-cathode arc evaporator has been applied. The design and operating principle of the reactor have been described. Experimental data on how the movement of a gaseous mixture in the reactor influences the properties of nanopowders have been presented.