Influence of Aluminium on the Structure and Electrical Properties of Amorphous Diamond-Like Silicon-Carbon Films

A. I. Popov; Попов А. И.; M. Yu. Presnyakov; Пресняков М. Ю.; E. P. Domashevskaya; Домашевская Э. П.; V. A. Terekhov; Терехов В. А.; M. A. Semenov-Shefov; Семенов-Шефов М. А.; V. P. Afanas’ev; Афанасьев В. П.; T. S. Chukanova; Чуканова Т. С.; D. A. Zezin; Зезин Д. А.; V. M. Yemets; Емец В. М.; A. D. Barinov; Баринов А. Д.; M. A. Shapetina; Шапетина М. А.

doi:10.31857/S1028096023110171

Influence of Aluminium on the Structure and Electrical Properties of Amorphous Diamond-Like Silicon-Carbon Films

Authors: Popov A.I.¹^,2, Presnyakov M.Y.³, Domashevskaya E.P.⁴, Terekhov V.A.⁴, Semenov-Shefov M.A.¹, Afanas’ev V.P.¹, Chukanova T.S.¹, Zezin D.A.¹^,2, Yemets V.M.¹, Barinov A.D.¹^,2, Shapetina M.A.⁵
Affiliations:
1. National Research University “Moscow Power Engineering Institute”
2. Institute of Nanotechnology of Microelectronics RAS
3. National Research Center “Kurchatov Institute”
4. Voronezh State University
5. Moscow State Pedagogical University
Issue: No 11 (2023)
Pages: 24-32
Section: Articles
URL: https://ogarev-online.ru/1028-0960/article/view/232207
DOI: https://doi.org/10.31857/S1028096023110171
EDN: https://elibrary.ru/LXCJUQ
ID: 232207

Cite item

Full Text

Open Access
Restricted Access

Access granted
Restricted Access

Subscription Access

Abstract
About the authors
References
Supplementary files
Statistics

Abstract

This article studies the influence of aluminium, a weak-carbide-forming metal, on phase composition, structure, and electro physical properties of amorphous diamond-like silicon-carbon films. The results of this study are compared with the influence on the same characteristics of strong-carbide-forming transition metals – titanium and hafnium. It is shown that the effects of aluminium and transition metals on the structure and properties of silicon-carbon films are fundamentally different. The addition of aluminium in a wide range of concentrations, in contrast to transition metals, does not lead to formation of a nano-crystalline phase in the films. The dependence of electrical conductivity on the aluminium concentration is smooth and monotonic, but in the case of transition metals, it has a pronounced percolation form. In addition, the absolute values of changes in electrical conductivity differ by orders of magnitude. The performed studies allowed us to conclude that the reasons for these differences are due to the interaction of metals with different chemical elements of the film. Transition metal atoms interact mainly with carbon atoms to form nanocrystals of highly conductive carbides. In contrast, aluminium atoms mainly interact with oxygen atoms and form an amorphous phase of aluminium oxide.

Keywords

silicon-carbon films, aluminium, transition metals, structure, phase composition, electrical conductivity, dielectric losses.

References

Meškinis Š., Tamulevičien’e A. // Mater. Sci. 2011. V. 17. № 4. P. 358. https://doi.org/10.5755/j01.ms.17.4.770
Vencatraman C., Goel A., Lei R., Kester D., Outten C. // Thin Solid Films. 1997. V. 308–309. P. 173. https://doi.org/10.1016/S0040-6090(97)00384-2
Mangolini F., Krick B.A., Jacobs T.D.B., Khanal S.R., Streller F., McClimon J.B., Hilbert J., Prasad S.V., Scharf T.W., Ohlhausen J.A., Lukes J.R., Sawyer W.G., Carpick R.W. // Carbon. 2018. V. 130. P. 127. https://doi.org/10.1016/j.carbon.2017.12.096
Zavedeev E.V., Zilova O.S., Shupegin M.L., Barinov A.D., Arutyunyan N.R., Roch T., Pimenov S.M. // Appl. Phys. A. 2016. V. 122. P. 961. https://doi.org/10.1007/s00339-016-0508-7
Bociaga D., Sobczyk-Guzenda A., Szymanski W., Jedrzejczak A., Jastrzebska A., Olejnik A., Swiatek L., Jastrzebski K. // Vacuum. 2017. V. 143. P. 395. https://doi.org/10.1016/j.vacuum.2017.06.027
Величко М.А., Гладких Ю.П. // Науч. ведомости Белгородского НИУ: Сер. Математика. Физика. 2016. № 6 (227). Вып. 42. С. 115.
Barinov A.D., Popov A.I., Presnyakov M.Yu. // Inorg. Mater. 2017. V. 53. № 7. P. 690. https://doi.org/10.1134/S0020168517070019
Popov A.I., Barinov A.D., Presniakov M.Y. // J. Nanoelectronics Optoelectronics. 2015. V. 9. № 6. P. 787. https://doi.org/10.1166/jno.2014.1678
Frolov V.D., Pimenov S.M., Zavedeev E.V., Konov V.I., Lubnin E.N., Kirpienko G.G. // J. Surf. Invest. X-ray, Synchrotron Neutron Tech. 2007. V. 1. № 3. P. 3203. https://doi.org/10.1134/S1027451007030135
Шупегин М.Л. // Заводская лаборатория. Диагностика материалов. 2013. Т. 79. № 2. С. 28.
Белогорохов А.И., Додонов А.М., Малинкович М.Д., Пархоменко Ю.Н., Смирнов А.П., Шупегин М.Л. // Известия вузов. Материалы электронной техники. 2007. № 1. С. 69.
Попов А.И., Баринов А.Д., Емец В.М., Кастро Арта Р.А., Колобов А.В., Кононов А.А., Овчаров А.В., Чуканова Т.С. // ФТТ. 2021. Т. 63. № 11. С. 1844.
Пресняков М.Ю., Попов А.И., Усольцева Д.С., Шупегин М.Л., Васильев А.Л. // Российские нанотехнологии. 2014. Т. 9. № 7–8. С. 59. https://doi.org/10.1134/S1995078014050139
Naumkin A.V., Kraut-Vass A., Gaarenstroom S.W., Powell C.J. // NIST X-ray Photoelectron Spectroscopy Database. Version 4.1. 2012. https://doi.org/10.18434/T4T88K
Попов А.И., Афанасьев В.П., Баринов А.Д., Бодиско Ю.Н., Грязев А.С., Мирошникова И.Н., Пресняков М.Ю., Шупегин М.Л. // Поверхность. Рентген., синхротр. и нейтрон. исслед. 2019. № 9. С. 49. https://doi.org/10.1134/S0207352819090129
Jansson U., Lewin E. // Thin Solid Films. 2013. V. 536. P. 1. https://doi.org/10.1016/J.TSF.2013.02.019
Bouabibsa I., Lamri S., Sanchette F. // Coatings. 2018. V. 8. Iss. 10. P. 370. https://doi.org/10.3390/coatings8100370
Попов А.И., Баринов А.Д., Емец В.М., Чуканова Т.С., Шупегин М.Л. // ФТТ. 2020. Т. 62. Вып. 10. С. 1612.
Popov A. Disordered Semiconductors: Physics and Applications (2nd Edition). Pan Stanford Publishing, 2018. 330 p. https://doi.org/10.1201/b22346
Борисова Т.М., Кастро Р.А. // Труды МФТИ. 2013. Т. 5. № 1. С. 21.