Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide

E. A. Kerimov; Керимов Э. А.

doi:10.31857/S0544126923700229

Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide

Autores: Kerimov E.A.¹
Afiliações:
1. Azerbaijan Technical University
Edição: Volume 52, Nº 2 (2023)
Páginas: 160-164
Seção: ТЕХНОЛОГИИ
URL: https://ogarev-online.ru/0544-1269/article/view/138497
DOI: https://doi.org/10.31857/S0544126923700229
EDN: https://elibrary.ru/PYLCTO
ID: 138497

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Texto integral

Resumo
Sobre autores
Bibliografia
Arquivos suplementares
Estatísticas

Resumo

When studying the optical properties of thin films, in order to obtain reliable information about the magnitude of their optical constants, it is necessary to accurately measure the thickness of the metal. Thickness 600 < d < 1500 Å is measured by the method of multibeam interferometry and the resonant-frequency method.

Palavras-chave

resonant frequency method, optical constants, multibeam interferometry method, quartz element

Sobre autores

E. Kerimov

Azerbaijan Technical University

Autor responsável pela correspondência
Email: E_Kerimov.fizik@mail.ru
Baku, AZ 1073 Azerbaijan

Bibliografia

Тришенков М.А. Фотоприемные устройства и ПЗС. М.: Радио и связь, 1992. 400 с.
Elliott C.T. Future infrared detector technologies // Fourth Int. Conf. on Advanced Infrared Detectors and Systems. 1990. P. 61–66.
Byrne C.F., Knowles P. Infrared formed in mercury cadmium telluride grown by MOCVD // Semicond. Sci. Technol. 1988. № 3. P. 377–381.
Иевлев В.М., Солдатенко С.А., Кущев С.Б. и др. Эффект фотонной активации синтеза пленок силицидов в гетеросистеме (111) Si–Ni–Pt // Конденсированные среды и межфазные границы. 2010. Т. 9. № 3. С. 216–227.