AACVD synthesis of bilayer thin-film ZnO/Cr2O3 nanocomposites for chemoresistive gas sensors

Cover Page

Cite item

Full Text

Open Access Open Access
Restricted Access Access granted
Restricted Access Subscription Access

Abstract

Using aerosol-assisted vapor deposition (AACVD), bilayer ZnO/Cr2O3 thin-film nanocomposites were prepared and validated using various physicochemical analysis techniques. The thermal behavior of precursors: zinc and chromium acetylacetonates was studied using TGA/DSC. The chemical composition of the obtained coatings was confirmed by EDX method, and the physical composition was confirmed by X-ray diffraction and Raman spectroscopy. The microstructural features were studied by SEM method. It was found that by varying the precursor concentration it is possible to change the morphology of the obtained coatings from an island structure to a continuous film. It is shown that ZnO/Cr2O3 bilayer films demonstrate a noticeable chemoresistive response in acetone detection.

About the authors

A. S. Mokrushin

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences

Email: artyom.nano@gmail.com
Moscow, 119991 Russia

S. A. Dmitrieva

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences; Mendeleev Russian University of Chemical Technology

Email: artyom.nano@gmail.com
Moscow, 119991 Russia; Moscow, 125047 Russia

Y. M. Gorban

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences; Mendeleev Russian University of Chemical Technology

Email: artyom.nano@gmail.com
Moscow, 119991 Russia; Moscow, 125047 Russia

A. R. Stroikova

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences; Mendeleev Russian University of Chemical Technology

Email: artyom.nano@gmail.com
Moscow, 119991 Russia; Moscow, 125047 Russia

N. P. Simonenko

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences

Email: artyom.nano@gmail.com
Moscow, 119991 Russia

A. A. Averin

Frumkin Institute of Physical Chemistry and Electrochemistry of the Russian Academy of Sciences

Email: artyom.nano@gmail.com
Moscow, 119071 Russia

E. P. Simonenko

Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences

Author for correspondence.
Email: artyom.nano@gmail.com
Moscow, 119991 Russia

References

  1. Damianos D., Mouly J., Delbos P. Status of the MEMS industry 2021 //“Status of the MEMS industry” Yole development. – 2021.
  2. Deng Y. // Semiconducting Metal Oxides for Gas Sensing. Elsеvier, 2019. https://doi.org/10.1007/978-981-13-5853-1
  3. Seiyama T., Kagawa S. // Anal. Chem. 1966. V. 38. № 8. P. 1069. https://doi.org/10.1021/ac60240a031
  4. Abegunde O.O., Akinlabi E.T., Oladijo O.P. et al. // AIMS Mater. Sci. 2019. V. 6. № 2. P. 174. https://doi.org/10.3934/matersci.2019.2.174
  5. Sun L., Yuan G., Gao L. et al. // Nature Rev. Methods Primers. 2021. V. 1. № 1. https://doi.org/10.1038/s43586-020-00005-y
  6. Kuzminykh Y., Dabirian A., Reinke M. et al. // Surf. Coat. Technol. 2013. V. 230. P. 13. https://doi.org/10.1016/j.surfcoat.2013.06.059
  7. Hou X., Choy K.L. // Chem. Vap. Deposition. 2006. V. 12. № 10. P. 583. https://doi.org/10.1002/cvde.200600033
  8. Jeong S.Y., Kim J.S., Lee J.H. // Adv. Mater. 2020. V. 32. № 51. P. 2002075. https://doi.org/10.1002/adma.202002075
  9. Ahmad R., Majhi S.M., Zhang X. et al. // Adv. Colloid Interface Sci. 2019. V. 270. P. 1. https://doi.org/10.1016/j.cis.2019.05.006
  10. Mokrushin A.S., Nagornov I.A., Gorban Y.M. et al. // J. Alloys Compd. 2024. V. 1009. P. 176856. https://doi.org/10.1016/j.jallcom.2024.176856
  11. Mokrushin A.S., Nagornov I.A., Gorban Y.M. et al. // Ceram. Int. 2023. V. 49. № 11. Part A. P. 17600. https://doi.org/10.1016/j.ceramint.2023.02.126
  12. Sinha M., Neogi S., Mahapatra R. et al. // Sens. Actuators, B: Chem. 2021. V. 336. P. 129729. https://doi.org/10.1016/j.snb.2021.129729
  13. Mokrushin A.S., Gorban Y.M., Averin A.A. et al. // Biosensors. 2023. V. 13. № 445. P. 1. https://doi.org/10.3390/bios13040445
  14. Mokrushin A.S., Gorban Y.M., Averin A.A. et al. // Ceram. Int. 2024. V. 50. № 6. P. 8777. https://doi.org/10.1016/j.ceramint.2023.12.194
  15. Simonenko E.P., Nagornov I.A., Mokrushin A.S. et al. // Micromachines. 2023. V. 14. № 725. P. 1. https://doi.org/10.3390/mi14040725
  16. Woo H.S., Na C.W., Kim I.D. et al. // Nanotechnology. 2012. V. 23. № 24. P. 245501. https://doi.org/10.1088/0957-4484/23/24/245501
  17. Jayababu N., Poloju M., Reddy M.V.R. // AIP Conf. Proc. 2019. V. 2082. № March. P. 3. https://doi.org/10.1063/1.5093843
  18. Park S., Sun G.J., Jin C. et al. // ACS Appl. Mater. Interfaces. 2016. V. 8. № 4. P. 2805. https://doi.org/10.1021/acsami.5b11485
  19. Najafi V., Zolghadr S., Kimiagar S. // Optik. 2019. V. 182. P. 249. https://doi.org/10.1016/j.ijleo.2019.01.015
  20. Wang T. yang, Li Y. yuan, Li T. tian et al. // Solid State Ionics. 2018. V. 326. P. 173. https://doi.org/10.1016/j.ssi.2018.10.006
  21. Kamalianfar A., Naseri M.G., Jahromi S.P. // Chem. Phys. Lett. 2019. V. 732. P. 136648. https://doi.org/10.1016/j.cplett.2019.136648
  22. Selvaraj B., Karnam J.B., Rayappan J.B.B. // Ceram. Int. 2023. V. 49. № 23. P. 37106. https://doi.org/10.1016/j.ceramint.2023.08.308
  23. Al-Hardan N.H., Abdullah M.J., Aziz A.A. // Appl. Surf. Sci. 2013. V. 270. P. 480. https://doi.org/10.1016/j.apsusc.2013.01.064
  24. Abdul Kareem S.M., Suhail M.H., Adehmash I.K. // Iraqi J. Sci. 2021. V. 62. № 7. P. 2176. https://doi.org/10.24996/ijs.2021.62.7.7
  25. Vallejos S., Pizúrová N., Gràcia I. et al. // ACS Appl. Mater. Interfaces. 2016. V. 8. № 48. P. 33335. https://doi.org/10.1021/acsami.6b12992
  26. Roy A., Sood A.K. // Pramana: J. Phys. 1995. V. 44. № 3. P. 201. https://doi.org/10.1007/BF02848471
  27. Šćepanović M., Grujić-Brojčin M., Vojisavljević K. et al. // J. Raman Spectroscopy. 2010. V. 41. № 9. P. 914. https://doi.org/10.1002/jrs.2546
  28. Gomes A.S.O., Yaghini N., Martinelli A. et al. // J. Raman Spectroscopy. 2017. V. 48. № 10. P. 1256. https://doi.org/10.1002/jrs.5198
  29. Chen M., Wang Z., Han D. et al. // J. Phys. Chem. C. 2011. V. 115. № 26. P. 12763. https://doi.org/10.1021/jp201816d

Supplementary files

Supplementary Files
Action
1. JATS XML
Download

Copyright (c) 2025 Russian Academy of Sciences

Согласие на обработку персональных данных

 

Используя сайт https://journals.rcsi.science, я (далее – «Пользователь» или «Субъект персональных данных») даю согласие на обработку персональных данных на этом сайте (текст Согласия) и на обработку персональных данных с помощью сервиса «Яндекс.Метрика» (текст Согласия).