The influence of the numerical aperture of a beam probing an object on the determination of the thickness of a layered object in confocal microscopy
- 作者: Lyakin D.V.1, Maksimova L.A.1, Sdobnov A.Y.1, Ryabukho V.P.1
-
隶属关系:
- Institute of Precision Mechanics and Control
- 期: 卷 123, 编号 3 (2017)
- 页面: 487-494
- 栏目: Geometrical and Applied Optics
- URL: https://ogarev-online.ru/0030-400X/article/view/165526
- DOI: https://doi.org/10.1134/S0030400X17090235
- ID: 165526
如何引用文章
详细
The influence of the numerical aperture of a light beam probing an object on the value measured with a confocal interference microscope when determining the thickness of layered object has been theoretically and experimentally investigated. The dependence of the measured value on the numerical aperture in the form of an analytical formula is obtained. It is established that the measured value is determined by the average longitudinal spatial frequency of the field probing the object. The results of experimental verification of the dependence obtained allow us to conclude that it is possible to increase the measurement accuracy of geometrical thickness and refractive index of layered micro-objects by the methods of confocal microscopy.
作者简介
D. Lyakin
Institute of Precision Mechanics and Control
编辑信件的主要联系方式.
Email: LDV-77@mail.ru
俄罗斯联邦, Saratov, 410028
L. Maksimova
Institute of Precision Mechanics and Control
Email: LDV-77@mail.ru
俄罗斯联邦, Saratov, 410028
A. Sdobnov
Institute of Precision Mechanics and Control
Email: LDV-77@mail.ru
俄罗斯联邦, Saratov, 410028
V. Ryabukho
Institute of Precision Mechanics and Control
Email: LDV-77@mail.ru
俄罗斯联邦, Saratov, 410028
补充文件
