A Technique for Measuring the Resistance of an Electrical Breakdown Channel in Thin Dielectric Films

Аннотация

A technique for measuring the rate of change in the breakdown-channel resistance and estimating the true amplitude and duration of the breakdown current was developed. This technique is based on the dependence of the amplitude and frequency of oscillations of the measured current on the channel resistance. The resistance of the breakdown channel and the breakdown current in a polymer dielectric film were determined.