Generation of a metal porous film by arc discharge
- 作者: Dyrenkov A.V.1, Smirnov B.M.1, Tereshonok D.V.1
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隶属关系:
- Joint Institute for High Temperature
- 期: 卷 55, 编号 6 (2017)
- 页面: 841-843
- 栏目: Plasma Investigations
- URL: https://ogarev-online.ru/0018-151X/article/view/157375
- DOI: https://doi.org/10.1134/S0018151X17060049
- ID: 157375
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详细
The copper wire vaporization method is applied to obtain porous copper film on a silicon surface. We determine the distribution of the surface clusters over the sizes and the density. The average size of the clusters under optimal conditions (at a distance of 2 mm from the discharge) is about 0.5 μm, and the deposition density is 3–5 clusters per squared μm.
作者简介
A. Dyrenkov
Joint Institute for High Temperature
Email: bmsmirnov@gmail.com
俄罗斯联邦, Moscow, 125412
B. Smirnov
Joint Institute for High Temperature
编辑信件的主要联系方式.
Email: bmsmirnov@gmail.com
俄罗斯联邦, Moscow, 125412
D. Tereshonok
Joint Institute for High Temperature
Email: bmsmirnov@gmail.com
俄罗斯联邦, Moscow, 125412
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