Thin-film electrodes of dielectric elastomer-based actuators for an active vibration control system

Precision research and technological equipment, as a rule, is not able to provide its specification characteristics without a high-quality vibration protection system. Active vibration control of an object is provided with the help of an additional source of movement, an actuator. The most promising high accuracy actuators are based on smart materials, such as materials with shape memory, piezoelectric and magnetostrictive materials, electro- and magnetic active fluids and elastomers. Dielectric elastomer is one of the types of electroactive polymers. Actuators based on a dielectric elastomer show high performance in terms of accuracy and speed and operate due to the controllable deformation of the elastomer under the action of a high voltage electric field. The paper provides a comparison of actuators based on sheet and thin film control electrodes. The influence of the quality of the polymer surface and the type of electrodes on the travel range of the actuator and maximum amplitude of vibrations the system can suppress on the basis of a dielectric elastomer is estimated. The formation of the electrode by magnetron sputtering in vacuum makes it possible to create a thin-film layer of copper that covers the elastomer, despite the developed surface. The effect of ion treatment of an elastomer before coating on the quality of the formed electrode is considered. After the ion treatment, the surface of the elastomer acquires a more uniform regular structure. A thin-film electrode layer is formed according to the topology of the elastomer to an accomplished standard.