Approaches to Increasing the Adhesion Strength of Hard Wear-Resistant Nanostructured Coatings Based on the Ti–B–(Cr, Si, C)–N System

Abstract

The structure and properties of Ti–B–N, Ti–Cr–B–N and Ti–Si–B–C–N coatings, deposited by magnetron sputtering are investigated. Various approaches to increasing adhesion strength are considered: deposition of sublayers, application of a high bias voltage at the beginning of deposition, preliminary ion etching of a substrate, and implantation by high-energy ions at various stages of deposition. Scratch testing is used to evaluate coating adhesion.