Simulation of Local Error Correction of the Surface Shape by a Low-Dimensional Ion Beam
- 作者: Chernyshev A.K.1,2, Malyshev I.V.1, Pestov A.E.1, Chkhalo N.I.1
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隶属关系:
- Institute for Physics of Microstructures, Russian Academy of Sciences
- Lobachevsky State University
- 期: 卷 64, 编号 11 (2019)
- 页面: 1560-1565
- 栏目: Article
- URL: https://ogarev-online.ru/1063-7842/article/view/204323
- DOI: https://doi.org/10.1134/S1063784219110069
- ID: 204323
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详细
We propose an algorithm for solving the problem of local error correction of the surface shape by a low-dimensional ion beam. The algorithm presumes successive sampling running over protrusions relative to the average height aimed at searching for the optimal etching point satisfying the criterion for the reduction of the sum of derivative moduli on the etching spot. It is shown that the new approach makes it possible to considerably extend the range of spatial frequencies accessible to the action for a given dimension of an ion beam.
作者简介
A. Chernyshev
Institute for Physics of Microstructures, Russian Academy of Sciences; Lobachevsky State University
Email: aepestov@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 607680; Nizhny Novgorod, 603950
I. Malyshev
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: aepestov@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 607680
A. Pestov
Institute for Physics of Microstructures, Russian Academy of Sciences
编辑信件的主要联系方式.
Email: aepestov@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 607680
N. Chkhalo
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: aepestov@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 607680
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