Scientific and Technical Basis of Application of Nanostructured Materials Science and Nanoelectronics in Systems of Electromechanical Energy Converters for Special Purposes

详细

We consider the current state of a completely new area of science; microsystem electromechanics. Тhe wide spectra of its practical applications and prospects for further development are analyzed. We discuss in detail two main directions of creating micro- and nanoelectromechanical converters as basic elements of microsystem electromechanics: “top down” and “down top.” We also describe the main technological methods in constructing basic functional elements of microsystem electromechanics, areas of their application in traditional and new technologies (information and computer technologies, medicine, aerospace, rocket and artillery systems, etc.). At the same time, we discuss some key issues of generalized physical and mathematical modeling of microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). A new generalized approach is proposed to study dynamic and energy characteristics of MEMS and NEMS as complex dynamic systems with binary conjugate subsystems. Based on proposed theoretical principles and models, the possibilities of studying electrophysical characteristics of biological nanostructures have been considered.