Enhancing the Resistance of Spectral Characteristics of Interference Coatings to Deviation in Parameters of Layers Entering into Their Composition

详细

A new method of enhancing the resistance of spectral characteristics of interference coatings to deviations in parameters of layers entering into their composition is presented. The spectral characteristic that can be obtained using this method for the energy transmittance (or reflectance) of an experimentally manufactured coating is maximally close to the characteristic of the synthesized coating. A way to use several samples for monitoring the thickness of layers during the process of their formation with the aim to reduce the deviation of optical layers during manufacturing of interference coatings is presented.