An imaging spectroradiometry system for measuring spatial temperature distributions in microscopic objects

Abstract

An imaging-spectrometry method for measuring the spatial distributions of the temperature of microscopic objects with nonuniform spectral-emissivity distributions over their surfaces is described. An acousto-optic imaging spectrometer that allows measurements of the temperature distributions in the range of 500–5000 K with an error of ~1% and a spatial resolution of 500 × 500 elements over the surfaces of objects with dimensions of at most 5 mm was developed and manufactured. The efficiency of the instrument was demonstrated experimentally in measurements of the spatial distribution of the temperature of a laserheated tungsten plate.