X-ray tomography as a diagnostic method of X-ray refractive optics

Abstract

This article describes the application of high-resolution X-ray computed tomography to assess the critical parameters of refractive lenses for X-ray optics that determine the quality of compound optical systems. A microfocus Y. Cheetah X-ray system has been used for three-dimensional visualization of the surface and internal structure of refractive lenses made of high-purity aluminum with geometric apertures of 500 and 1500 μm. A Fein Focus X-ray tube with a focal spot size of less than 2 μm provides the resolution necessary for detecting critical-size microstructure defects in the material of the lens.