LED magneto-optical ellipsometer with the switching of orthogonal polarization states


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Abstract

A light-emitting diode (LED) magneto-optical ellipsometer with the switching of orthogonal polarization states is described. The distinctive features of the ellipsometer are the implementation of the maximally deep azimuthal modulation, application of two-channel detector, use of a set of LEDs ensuring a high signal-to-noise ratio, and the absence of moving polarization elements. These features have substantially increased the precision of measurements of ellipsometric parameters ψ and Δ for ferromagnetic materials and their changes (δψ and δΔ) in the magnetic field, which are connected for the transverse Kerr configuration by simple relations with magneto-optical parameters. At wavelengths of 365, 372, 390, 405, 420, and 465 nm, the precision of ψ-δψ and Δ-δΔ measurements of metal films is about 0.0003° and 0.001°, respectively. The spectral resolution is 4 nm; the minimal measurement time of ψ and Δ in the continuous spectral range of 270–1000 nm is 20 s; the magnetic field is varied from–2500 to +2500 Oe; and the step of the magnetic field setting is 0.5 Oe.

About the authors

D. V. Vasil’ev

Scientific–Manufacturing Complex Technological Center MIET

Email: ellipsometry@yandex.ru
Russian Federation, proezd 4806, 5, Zelenograd, Moscow, 124498

E. P. Orlov

Scientific–Manufacturing Complex Technological Center MIET

Email: ellipsometry@yandex.ru
Russian Federation, proezd 4806, 5, Zelenograd, Moscow, 124498

V. I. Kovalev

Kotel’nikov Institute of Radio Engineering and Electronics, Fryazino Branch

Author for correspondence.
Email: ellipsometry@yandex.ru
Russian Federation, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190

A. I. Rukovishnikov

Kotel’nikov Institute of Radio Engineering and Electronics, Fryazino Branch

Email: ellipsometry@yandex.ru
Russian Federation, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190

N. M. Rossukanyi

Kotel’nikov Institute of Radio Engineering and Electronics, Fryazino Branch

Email: ellipsometry@yandex.ru
Russian Federation, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190

S. V. Kovalev

Kotel’nikov Institute of Radio Engineering and Electronics, Fryazino Branch

Email: ellipsometry@yandex.ru
Russian Federation, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190

V. V. Kovalev

Kotel’nikov Institute of Radio Engineering and Electronics, Fryazino Branch

Email: ellipsometry@yandex.ru
Russian Federation, pl. Vvedenskogo 1, Fryazino, Moscow oblast, 141190

V. V. Amelichev

Scientific–Manufacturing Complex Technological Center MIET

Email: ellipsometry@yandex.ru
Russian Federation, proezd 4806, 5, Zelenograd, Moscow, 124498

D. V. Kostyuk

Scientific–Manufacturing Complex Technological Center MIET

Email: ellipsometry@yandex.ru
Russian Federation, proezd 4806, 5, Zelenograd, Moscow, 124498

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